Ultrasonic Spraying Technology for Vacuum Vapor Deposition
The ultrasonic atomization spraying system is used for integration into a vacuum chamber. Through experiments, it has been proven that the unique ultrasonic atomization spraying system design can be integrated into a vacuum sealed platform, suitable for applications such as polymer vapor deposition (PVD) and metal organic chemical vapor deposition (MOCVD). The characteristic low-speed atomization generated by the ultrasonic atomization spraying system can produce a vapor cloud with tight droplet distribution and frequency controlled droplet size. Due to the fact that ultrasonic atomizing nozzles work by converting high-frequency sound waves into mechanical vibrations, the liquid in contact with the nozzle surface is atomized without adding air or gas, so the integrity of the vacuum chamber is not weakened during the spraying process.
The ultrasonic generator technology integrated into the ultrasonic atomization spraying system provides the necessary electrical energy for atomization and is equipped with advanced load balancing function, which can automatically adjust to adapt to different vacuum conditions, thus maintaining the most stable spraying characteristics during the vacuum deposition process.
The ultrasonic atomization spraying system is suitable for high-temperature vacuum environments and has cooling capacity and temperature monitoring function to ensure appropriate thermal protection.
Advantages of vacuum chamber application:
- Electronic devices designed for load balancing
- High temperature protection and monitoring
- Unique vacuum condition liquid flow restriction design
- Atomization is generated in the absence of air/gas, maintaining vacuum integrity
