Semiconductor Photoresist Ultrasonic Lithography Coating System

Hangzhou Shengtu Technology Co., Ltd. is one of the leading manufacturers and suppliers of semiconductor photoresist ultrasonic lithography coating system in China. Welcome to buy high quality customized products at low price from our factory. Contact us for more details.

 

 

Ultrasonic spraying serves as a straightforward, cost-effective and highly repeatable method for photoresist coating during wafer lithography processes. FUNSONIC's ultrasonic lithography coating system for semiconductor photoresist adopts sophisticated layered deposition technology to achieve precise regulation over fluid flow rate, coating travelling speed and material deposition volume.

By adopting low-velocity spray forming, the equipment can shape atomized droplets into precisely controllable spray patterns. This effectively eliminates overspray issues and delivers ultra-thin, highly homogeneous coating films.

FUNSONIC's system excels in forming exceptionally uniform deposited layers, particularly on the upper sections of sidewalls for high-aspect-ratio trenches and V-groove structures. In contrast, traditional spin-coating (centrifugal spinning) fails to achieve conformal sidewall coverage, and inevitably causes excessive photoresist accumulation at trench bottom cavities.

 

 

1. Delivers consistent film coverage on diverse complex surface profiles.

2. Achieves superior coating uniformity on high-aspect-ratio grooves.

3. Features clog-free atomization spray performance.

4. Enables precise deposition of ultra-uniform single-micron thin films.

5. Adopts a mature, highly repeatable spraying process.

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Hot Tags: semiconductor photoresist ultrasonic lithography coating system, China semiconductor photoresist ultrasonic lithography coating system manufacturers, suppliers, factory, Ultrasonic Medical Antibacterial Bandage Textile Spraying Coated, 110Khz Special Ultrasonic Precision Coating for Perovskite Batteries, Ultrasonic Film Spray Coater For Battery Electrodes With Various Nozzles, Intelligent Ultrasonic Dispersion Manual Liquid Supply Pump, Ultrasonic Thin Film Photovoltaic Cell Atomization Nano Particle Coating, Aluminum Alloy Heating Vacuum Adsorption Platform