Products
Advanced Ultrasonic Coating Technology For Bare Wafer Spraying
Item No: FS620
Frequency: 20-200KHz
Power: 1-15w
Continuous spraying amount(max): 0.01-1ml/min
Effective spraying width: 0.5-2mm
Spray uniformity: ≥95%
Solution viscosity: ≤15cps
Spray Height: 10-20mm
Hangzhou Shengtu Technology Co., Ltd. is one of the leading manufacturers and suppliers of advanced ultrasonic coating technology for bare wafer spraying in China. Welcome to buy high quality customized products at low price from our factory. Contact us for more details.
Device Description:
Ultrasonic spraying for bare wafers is an advanced coating technology applied in semiconductor manufacturing and microelectronics industries. Bare wafers are semiconductor substrates that have not undergone packaging or subsequent fabrication processes, and serve as the foundational material for integrated circuits and microelectronic component production.
FUNSONIC generates coating mist through ultrasonic vibration to produce fine droplets, which deposit evenly across the bare wafer surface. This process delivers consistent coating thickness and effectively minimizes coating defects.
Application :
1. Photoresist coating
Applied in the photoresist deposition step of lithography processes to achieve uniform photoresist coverage across wafer surfaces.
2. Protective coating
Provides surface protection for bare wafers and shields substrates from performance degradation caused by environmental factors.
3. Functional coating
For targeted application scenarios, functional films including conductive, insulating and waterproof layers can be deposited via ultrasonic spraying.
Why Choose Us:
Application:
Certification
Our Laboratory & Equipment
Our Production Line
Packing&Delivery
Our Team
FUNSONIC BIG FAMILY
Company Exhibition
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Product Type |
Intelligent Ultrasonic Precision Coating Machine desktop Type FS620 |
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Spray Nozzle Operating Frequency |
20-200Khz |
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Nozzle Power |
1-15W |
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Continuous Spraying Volume Max |
0.5-10ml/min |
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Effective Spraying Width |
2-20mm |
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Spray Uniformity |
≥95% |
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Solution Conversion Rate |
≥95% |
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Dry Film Thickness |
20nm-100μm |
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Solution Viscosity |
≤30cps |
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Temperature Range |
1-60℃ |
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Atomized Particles (Median Value) |
15-40μm (distilled water), determined by the frequency of the nozzle |
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Diversion Pressure Max |
≤0.05MPA |
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Input Voltage |
220V±10%/50-60Hz |
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Exercise Mode |
XYZ three-axis, independently programmable |
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Control Mode |
FUNSONIC spraying control system, PLC control, 13.3-inch full-color touch screen |
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Control Content |
Ultrasonic spraying, liquid supply, heating, ultrasonic dispersion and other systems |
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Liquid Supply Method |
Precision injection pump |
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Ultrasonic Dispersion System (Optional) |
20ml or 50ml, 40K, biological grade sampler |
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Rated Power of Ultrasonic Dispersion System |
100W |
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