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Nanotechnology Semiconductor Process Ultrasonic Photoresist Spraying Technology
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Nanotechnology Semiconductor Process Ultrasonic Photoresist Spraying Technology

Nanotechnology Semiconductor Process Ultrasonic Photoresist Spraying Technology

Item No: FS650
Frequency: 20-200khz for Optional
Power: 10-100w
Spray Uniformity: ≥95%
Solution Conversion Rate: ≥95%
Solution viscosity: ≤30cps
Atomized particles (median value): 10-45μm（Distilled water),
determined by nozzle frequency

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Hangzhou Shengtu Technology Co., Ltd. is one of the leading manufacturers and suppliers of nanotechnology semiconductor process ultrasonic photoresist spraying technology in China. Welcome to buy high quality customized products at low price from our factory. Contact us for more details.

 

 

Description:

 

In nanoscale semiconductor manufacturing workflows, ultrasonic photoresist spraying works by inducing high-frequency mechanical vibration within the photoresist medium to form fine droplets, which are then delivered to the wafer surface via carrier gas.


Uniform photoresist coverage across the wafer is a core prerequisite to achieve repeatable, stable and functional lithography outcomes. Photoresists are typically formulated as high-viscosity suspensions dissolved in organic solvents or aqueous solutions; for this reason, ultrasonic spraying is widely adopted as the preferred photoresist coating method to meet stringent process specifications.

 

 

Troubleshooting :

 

1. Uneven Spraying
Causes

  • Nozzle clogging or abrasion
  • Unstable ultrasonic operating frequency
  • Unsuitable viscosity of photoresist coating liquid

Solutions

  • Clean or replace the nozzle
  • Perform calibration on the ultrasonic generator
  • Adjust the viscosity of coating raw materials

 

2. Abnormal Droplet Size (Overlarge or Undersmall Spray Particles)
Causes

  • Improper configuration of ultrasonic process parameters
  • The nozzle structure does not match the currently used coating material

Solutions

  • Adjust ultrasonic frequency and output power
  • Replace with a matched dedicated nozzle

 

 

Conemist Spray 1

 

Conemist Spray 2

FS620 FUNSONIC

 
Application:

 

Ultrasonic Spray Coating Application 3
Ultrasonic Spray Coating Application 5
Ultrasonic Spray Coating Application 4
Ultrasonic Spray Coating Application 14
Ultrasonic Spray Coating Application 10
Ultrasonic Spray Coating Application 11

 

Certification

 

FUNSONIC Certification 1

 

 

Our Laboratory

 

product-1200-800
Lab

 

Our Production Line

 

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Packing&Delivery

 

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3 2001

 

Our Team
FUNSONIC BIG FAMILY

 

FUNSONIC FAMILY 1
 
FUNSONIC 1
 
FUNSONIC 3
 
FUNSONIC 2
 
FUNSONIC 6
 
Our Team 3
 
Company Exhibition

 

Foshan Exhibition 1
Foshan Exhibition 4
Foshan Exhibition 5
Malaysia Exhibition 2
Malaysia Exhibition 3
Malaysia Exhibition 5

 

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Product Type

Floor-stand Ultrasonic Spray Coating Machine FS650

Spray Nozzle Operating Frequency

20-200KHz (Normally use 60\100K)

Nozzle Power

1-15W

Continuous Spraying Volume Max

Determine based on the type and quantity of nozzles configured (Max 5 Nozzles)

Effective Spraying Width

Determine based on the type and quantity of nozzles configured

Spray Uniformity

≥95%

Solution Conversion Rate

≥95%

Dry Film Thickness

20nm-100μm

Solution Viscosity

≤30cps

Temperature Range

1-60℃

Atomized Particles (Median Value)

10-45μm (distilled water), determined by the frequency of the nozzle

Diversion Pressure Max

≤0.15MPA

Input Voltage

220V±10%/50-60Hz

Exercise Mode

A spraying control system independently developed by FUNSONIC based on the Windows system, with PLC control, 15.6-inch full-color touch screen, XYZ three-axis imported servo motor, R-axis start rotation, and fully enclosed precision screw module

Control Mode

PLC control, operation control system developed based on Windows system, supporting remote operation, upgrading, etc

Control Content

The touch screen integrates ultrasonic nozzle, liquid supply, heating, adsorption, ultrasonic dispersion and other controls, and also has system monitoring, alarm and other functions

Liquid Supply Method

Precision injection pump

Ultrasonic Dispersion System (Optional)

20ml or 50ml, 40K, biological grade sampler

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