Polyimide and Photoresist Ultrasonic Spraying System

Ultrasonic spraying systems have been proven to be suitable for various applications that require uniform and repeatable photoresist or polyimide film coatings. By controlling the thickness from submicron to over 100 microns and being able to coat any shape or size, coating systems are a viable alternative to other coating techniques such as rotary and traditional spraying.

Common applications of polyimide and photoresist coatings include but are not limited to MEMS, lenses, microfluidic devices, microelectronics, and filters. Coating systems are capable of coating flat and 3D substrates, typically including silicon chips, glass, ceramics, and metals.

Ultrasonic spraying is a simple, economical, and reproducible process for photoresist and polyimide coating. The ultrasonic coating system can accurately control the flow rate, coating speed, and deposition amount using simple layering techniques. Low speed spray molding defines atomized spray as an accurate and controllable pattern to avoid overspray and produce very thin and uniform layers.

Advantages of ultrasonic polyimide and photoresist coatings:

1. Uniform film coverage of various surface contours.
2. High flexibility in chemical and coating properties.
3. Non clogging atomizing spray.
4. High transmission efficiency with minimal waste.
5. Highly reproducible mature spraying process.

The ultrasonic spraying system uses high-frequency sound vibration to generate a soft mist composed of mathematically defined droplets. The blockage is eliminated because no pressure is used to generate spray, and the droplets have very narrow droplet distribution size, which further contributes to the uniformity of the deposition layer.