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Polyimide And Photoresist Ultrasonic Spraying Coating System With Micro Nozzle
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Polyimide And Photoresist Ultrasonic Spraying Coating System With Micro Nozzle

Polyimide And Photoresist Ultrasonic Spraying Coating System With Micro Nozzle

Item No: FS650
Frequency: 20-200khz for Optional
Power: 10-100w
Spray Uniformity: ≥95%
Solution Conversion Rate: ≥95%
Solution viscosity: ≤30cps
Atomized particles (median value): 10-45μm(Distilled water),
determined by nozzle frequency

Hangzhou Shengtu Technology Co., Ltd. is one of the leading manufacturers and suppliers of polyimide and photoresist ultrasonic spraying coating system with micro nozzle in China. Welcome to buy high quality customized products at low price from our factory. Contact us for more details.

 

Description:

 

Ultrasonic spraying systems have been verified to deliver consistent, repeatable coating layers for photoresist and polyimide materials, making them a straightforward, cost-effective and highly replicable process for such film deposition.
Typical use cases for ultrasonic polyimide and photoresist coating cover MEMS components, optical lenses, microfluidic chips, microelectronic devices and filters, among others. The coating equipment works well on both planar and three-dimensional substrates, commonly silicon wafers, glass, ceramics and metallic materials.

 

 

Structure and principle of ultrasonic nozzle :

 

An ultrasonic nozzle is a resonant tuning device operating at a designated resonant frequency. Its maximum overall length and outer diameter are inversely proportional to its resonant frequency, with an available working frequency range of 25 kHz to 120 kHz. In short, a higher ultrasonic frequency corresponds to a smaller transducer size, alongside finer droplets produced by nozzle atomization.


An ultrasonic nozzle is assembled from multiple core components. Its driving unit comprises two piezoelectric transducers that convert electrical energy into mechanical vibration. High-frequency excitation power is supplied by an independent ultrasonic generator, which automatically locks and tracks the nozzle's resonant frequency. The piezoelectric stack is sandwiched between two titanium horns. These titanium horns amplify mechanical vibration to maximize energy transmission to the atomizing tip. Titanium is selected for its high tensile strength, superior acoustic transmission performance and outstanding corrosion resistance.


Process liquid is delivered to the atomizing tip via a full-length, large-diameter internal flow channel. Upon reaching the atomizing surface, the fluid is subjected to high-amplitude vibration and broken down into low-velocity fine droplets with a velocity below 3 inches per second. Stable atomization requires operating power to be maintained within a narrow effective range. Insufficient input power fails to trigger atomization entirely. Excessively high power violently shears the liquid into large splashes, which renders the spray unusable for precision coating applications. In general, the operating power of the nozzle ranges from 1 W to 15 W, depending on nozzle geometry and physical properties of the liquid being sprayed.

 

MicroMist XYZ

 

Ultrasonic Precision System 1

FS620 FUNSONIC

 
Application:
Be used in a wide range of industries.

 

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Anion membrane electrode spraying

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Carbon paper spraying

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Perovskite battery spraying

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Photovoltaic cell

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Solar panel spraying

Certification

 

FUNSONIC Certification 1

 

 

Our Laboratory

 

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Lab

 

Our Production Line

 

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Packing&Delivery

 

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Packing and Delivery 9
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Packing and Delivery 14
Packing and Delivery 1

 

Our Team

 

fUNSONIC BIG FAMILY

 

FUNSONIC 2
 
FUNSONIC 4
 
FUNSONIC 6
 
FUNSONIC FAMILY 2
 
FUNSONIC FAMILY 4
 
Our Team 3
 
Company Exhibition

 

Beijing Exhibition 2
Beijing Exhibition 1
Beijing Exhibition 5
Foshan Exhibition 1
Foshan Exhibition 4
Foshan Exhibition 5

 

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Product Type

Floor-stand Ultrasonic Spray Coating Machine FS650

Spray Nozzle Operating Frequency

20-200KHz (Normally use 60\100K)

Nozzle Power

1-15W

Continuous Spraying Volume Max

Determine based on the type and quantity of nozzles configured (Max 5 Nozzles)

Effective Spraying Width

Determine based on the type and quantity of nozzles configured

Spray Uniformity

≥95%

Solution Conversion Rate

≥95%

Dry Film Thickness

20nm-100μm

Solution Viscosity

≤30cps

Temperature Range

1-60℃

Atomized Particles (Median Value)

10-45μm (distilled water), determined by the frequency of the nozzle

Diversion Pressure Max

≤0.15MPA

Input Voltage

220V±10%/50-60Hz

Exercise Mode

A spraying control system independently developed by FUNSONIC based on the Windows system, with PLC control, 15.6-inch full-color touch screen, XYZ three-axis imported servo motor, R-axis start rotation, and fully enclosed precision screw module

Control Mode

PLC control, operation control system developed based on Windows system, supporting remote operation, upgrading, etc

Control Content

The touch screen integrates ultrasonic nozzle, liquid supply, heating, adsorption, ultrasonic dispersion and other controls, and also has system monitoring, alarm and other functions

Liquid Supply Method

Precision injection pump

Ultrasonic Dispersion System (Optional)

20ml or 50ml, 40K, biological grade sampler

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