Ultrasonic Spray Pyrolysis Equipment and TCO Coating System

Uniform thin film indium tin oxide (ITO), aluminum doped zinc oxide (AZO), zinc oxide (ZnO) and fluorine doped oxide layers are usually produced by ultrasonic spray pyrolysis technology. This unique process requires specialized coating equipment to create the necessary coating thickness and shape, and to spray corrosive solutions in high-temperature environments.

During high-temperature ultrasonic spray pyrolysis, the precursor solution (such as aluminum zinc oxide) is sprayed onto the substrate heated to about 300-500 ℃. The solvent evaporates during transportation, and a ZnO crystal film grows on the substrate surface, usually sodium calcium or other glass. The substrate temperature usually determines the morphological characteristics of the film.

Ultrasonic spray wet deposition provides manufacturers with a cost-effective alternative to vacuum deposition and sputtering, with higher transfer efficiency. The droplet size generated by the ultrasonic atomizing nozzle is highly uniform, which can achieve the optimal size of droplets for pyrolysis reaction, and all droplets will react simultaneously in the same way during the deposition process. Whether it is research and development or mass production, this will bring efficient TCO production processes.

The use of FUNSONIC ultrasonic nozzle overcomes the process challenge of spraying highly corrosive acids. The nozzle is made of corrosion-resistant structural materials and has the properties of no blockage, repeatability, and long life. It can even spray highly corrosive hydrochloric acid or hydrofluoric acid solutions.

Advantages of ultrasonic spray pyrolysis system for TCO coating:

1. Compared with CVD (chemical vapor deposition) process, ultrasonic spray pyrolysis is simple, flexible and cost-effective.
2. Proven TCO coating expertise.
Compared with other spraying methods, ultrasonic nozzles can deposit more uniform layers.
4. Easy to adjust and repeatable coating parameters.
5. Fully integrated patented ultrasonic nozzle technology and liquid delivery, providing a complete coating solution.
Alternative low-temperature spray pyrolysis (250 ℃ and below) processes are constantly emerging, and more research and development have been carried out on chemicals that do not need high-temperature target substrates.