Products
Ultrasonic Semiconductor Wafer Coating
Item No: FS620
Frequency: 20-200khz for Optional
Power: 1-15w
Continuous spraying amount(max): 0.5-10ml
Effective spraying width: 2-20mm
Spray uniformity: ≥95%
Solution viscosity: ≤30cps
Atomized particles (median value): 10-45μm(Distilled water),
determined by nozzle frequency
Hangzhou Shengtu Technology Co., Ltd. is one of the leading manufacturers and suppliers of ultrasonic semiconductor wafer coating in China. Welcome to buy high quality customized products at low price from our factory. Contact us for more details.
Description:
Wafer-level coating is a specialized process designed for automated dispensing of die attach adhesives directly on whole wafers, which are then cured into die attach films in subsequent procedures.
FUNSONIC ultrasonic coating technology for semiconductor wafers is well-matched to wafer coating applications. It delivers outstanding performance in processing throughput, precise film thickness regulation and excellent material layer uniformity. After thermal curing or UV curing followed by wafer dicing, thermocompression bonding is adopted to realize chip interconnection. This process yields uniform adhesive fillets and well-defined tiny fillet radii.
When deploying ultrasonic wafer coating technology, key spray parameters including ultrasonic frequency, traverse speed and target coating thickness must be optimized based on actual adhesive materials and technical specifications. In addition, material characteristics exert notable influence on final spraying results. Critical indices such as adhesive viscosity, surface tension and solvent volatility should be fully evaluated during material selection.
Application :
1. Photosensitive Layer Coating
For lithography processes, ultrasonic coating technology achieves even deposition of photoresist to guarantee high-precision pattern transfer.
2. Protective Coating
Anti-corrosion and anti-scratch protective films are applied on wafers to improve their mechanical durability.
3. Functional Coating
For customized application scenarios, functional coatings with designated electrical or optical performance can be deposited onto wafer surfaces.
Ultrasonic Nozzles Optional
Frequency from 25khz to 200khz








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Product Type |
Intelligent Ultrasonic Precision Coating Machine desktop Type FS620 |
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Spray Nozzle Operating Frequency |
110KHz or Customized |
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Nozzle Power |
1-15W |
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Continuous Spraying Volume Max |
0.5-12ml/min |
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Effective Spraying Width |
50-100mm |
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Spray Uniformity |
≥95% |
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Solution Conversion Rate |
≥95% |
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Dry Film Thickness |
20nm-100μm |
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Solution Viscosity |
≤20cps |
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Temperature Range |
1-60℃ |
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Atomized Particles (Median Value) |
15-28μm (distilled water), determined by the frequency of the nozzle |
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Diversion Pressure Max |
≤0.15MPA |
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Input Voltage |
220V±10%/50-60Hz |
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Exercise Mode |
XYZ three-axis, independently programmable |
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Control Mode |
FUNSONIC spraying control system, PLC control, 13.3-inch full-color touch screen |
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Control Content |
Ultrasonic spraying, liquid supply, heating, ultrasonic dispersion and other systems |
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Liquid Supply Method |
Precision injection pump |
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Ultrasonic Dispersion System (Optional) |
20ml or 50ml, 40K, biological grade sampler |
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Rated Power of Ultrasonic Dispersion System |
100W |
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